1한국생산기술연구원 국가희소금속센터
2고려대학교 신소재공학과
1Korea Institute of Industrial Technology, Incheon 21655, Republic of Korea
2Department of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea
© The Korean Powder Metallurgy & Materials Institute
This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/4.0/) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Funding
This study was supported in part by the internal research project of Korea Institute of Industrial Technology (Project No. EM220006, Development of material preparation/surface treatment/post-processing for molten metal-based hard-facing technology with higher than 40 HRC hardness) and by the government and local government-funded commissioned project (Project No. IZ250036, Development of TiC self-propagating high-temperature synthesis manufacturing process technology to develop advanced electrostatic chuck for semiconductor wafer fixation).
Conflict of Interest
The authors declare no conflict of interest.
Data Availability Statement
All dataset files used in this study can be available on request.
Author Information and Contribution
YongKwan Lee: Ph.D. Candidate; conceptualization, Investigation, Visualization, writing - original draft, Data curation, Software Hyun-chul Kim: Ph.D. Candidate; conceptualization, Investigation, Visualization, writing - original draft, Data curation, Software Myungsuk Kim: Ph.D. Candidate; Formal analysis, Data curation, Investigation Soong Ju Oh: Professor; Investigation, Conceptualization, Validation, Writing - Review & Editing Kyoungtae Park: Principal Researcher; Investigation, Conceptualization, Validation, Supervision, Project administration, Funding acquisition, Writing-Original Draft, Writing - Review & Editing JaeJin Sim: Senior Researcher; Investigation, Conceptualization, Validation, Supervision, Project administration, Writing-Original Draft, Writing - Review & Editing
Acknowledgments
None.
Parameter | Value |
---|---|
Power [kW] | 23 |
Vacuum level of vacuum chamber [Torr] | 9.0*10-2 |
Nozzle type | Direct injection type |
Orifice diameter [mm] | 4 |
Atomizing gas | Ar |
Atomizing pressure [bar] | 25 |
Material Properties | Air | Water | Copper | Stellite |
---|---|---|---|---|
Density (Kg/m3) | 1,900 | 5,200 | 8,940 | 7,760 |
Thermal conductivity (W/m*K) | 0.3 | 1,000 | 400 | 22.5 |
Specific heat capacity (J/Kg*K) | 1,369 | 5,200 | 385 | 610 |
Electrical conductivity (S/m) or Electrical resistivity (ohm*m) | 4E-3 (Electrical conductivity) | 5.5E-6 (Electrical conductivity) | 6E7 (Electrical conductivity) | 2.5E-8 (Electrical resistivity) |
Relative permittivity | 4.5 | 1 | 1 | 1 |
Relative permeability | 1 | 80 | 1 | 1 |
Parameter | Value |
---|---|
Coil power [kW] | 53 (Maximum operating power of the coil) |
Frequency [kHz] | 3 |
Operation Time [min] | 50 |
C1 (m) | C2 (m) | C3 (m) | C4 (m) | C5 (m) |
---|---|---|---|---|
0.01 | 0.02 | 0.03 | 0.04 | 0.05 |
Parameter | Value |
---|---|
Power [kW] | 23 |
Vacuum level of vacuum chamber [Torr] | 9.0*10-2 |
Nozzle type | Direct injection type |
Orifice diameter [mm] | 4 |
Atomizing gas | Ar |
Atomizing pressure [bar] | 25 |