Tri-isotropic (TRISO) coatings on zirconia surrogate beads are deposited using a fluidized-bed vapor deposition (FB-CVD) method. The silicon carbide layer is particularly important among the coated layers because it acts as a miniature pressure vessel and a diffusion barrier to gaseous and metallic fission products in the TRISO-coated particles. In this study, we obtain a nearly stoichiometric composition in the SiC layer coated at 1400°C, 1500°C, and 1400°C with 20 vol.% methyltrichlorosilane (MTS), However, the composition of the SiC layer coated at 1300-1350°C shows a difference from the stoichiometric ratio (1:1). The density decreases remarkably with decreasing SiC deposition temperature because of the nanosized pores. The high density of the SiC layer (≥ 3.19 g/cm²) easily obtained at 1500°C and 1400°C with 20 vol.% MTS did not change at an annealing temperature of 1900°C, simulating the reactor operating temperature. The evaluation of the mechanical properties is limited because of the inaccurate values of hardness and Young’s modulus measured by the nano-indentation method.