Synthesis of Nano-size Aluminum Nitride Powders by Chemical Vapor Process

Jae-Hwan Pee; Jong-Chul Park; Yoo-Jin Kim; Kwang-Taek Hwang; So-Ryong Kim

doi:10.4150/KPMI.2008.15.6.496

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Page Path: HOME > J Korean Powder Metall Inst > Volume 15(6); 2008 > Article

화학기상공정을 이용한 나노질화알루미늄 분말 합성: 피재환, 박종철, 김유진, 황광택, 김수룡
Synthesis of Nano-size Aluminum Nitride Powders by Chemical Vapor Process: Jae-Hwan Pee, Jong-Chul Park, Yoo-Jin Kim, Kwang-Taek Hwang, So-Ryong Kim; Journal of Korean Powder Metallurgy Institute 2008;15(6):496-502
DOI: https://doi.org/10.4150/KPMI.2008.15.6.496

¹요업(세라믹)기술원 산업도자팀
²요업(세라믹)기술원 산업도자팀
³요업(세라믹)기술원 산업도자팀
⁴요업(세라믹)기술원 산업도자팀
⁵요업(세라믹)기술원 산업도자팀
¹Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
²Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
³Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
⁴Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
⁵Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology

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Abstract

Aluminum nitride (AlN) powders were prepared by the chemical vapor synthesis (CVS) process in the AlCl_3-NH_3-N_2 system. Aluminum chloride (AlCl_3) as the starting material was gasified in the heating chamber of 300°C. Aluminum chloride gas transported to the furnace in NH_3-N_2 atmosphere at the gas flow rate of 200-400ml/min. For samples synthesized between 700 and 1200°C, the XRD peaks corresponding to AlN were comparatively sharp and also showed an improvement of crystallinity with increasing the reaction temperature. In additions, the average particle size of the AlN powders decreased from 250 to 40 nm, as the reaction temperature increased.

Keywords: AlN;Nitridation;Chemical vapor synthesis;AlCl_3-NH_3-N_2 system;

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A Scale-Up Test for Preparation of AlN by Carbon Reduction and Subsequent Nitridation Method
Hyung-Kyu Park, Sung-Don Kim, Chul-Woo Nam, Dae-Woong Kim, Moon-Soo Kang, Gwang-Hee Shin
Journal of the Korean Institute of Resources Recycling.2016; 25(5): 75. CrossRef
Synthesis of High Purity Aluminum Nitride Nanopowder in Ammonia and Nitrogen Atmosphere by RF Induction Thermal Plasma
Kyung-In Kim, Sung-Churl Choi, Jin-Ho Kim, Kwang-Taek Hwang, Kyu-Sung Han
Journal of the Korean Ceramic Society.2014; 51(3): 201. CrossRef
Synthesis of an aluminum nitride–yttria (AlN–Y2O3) composite from nano-sized porous AlN and YCl3
Jae-Hwan Pee, Jong-Chul Park, Kwang-Taek Hwang, SooRyong Kim, Woo-Seok Cho
Research on Chemical Intermediates.2010; 36(6-7): 801. CrossRef

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